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Spin-photon interfaces based on solid-state atomic defects have enabled a variety of key applications in quantum information processing. To maximize the light-matter coupling strength, defects are often placed inside nanoscale devices. Efficiently coupling light and microwave radiation into these structures is an experimental challenge, especially in cryogenic or high vacuum environments with limited sample access. In this work, we demonstrate a fiber-based scanning probe that simultaneously couples light into a planar photonic circuit and delivers high power microwaves for driving electron spin transitions. The optical portion achieves 46% one-way coupling efficiency, while the microwave portion supplies an AC magnetic field with strength up to 9 Gauss at 10 Watts of input microwave power. The entire probe can be scanned across a large number of devices inside a³He cryostat without free-space optical access. We demonstrate this technique with silicon nanophotonic circuits coupled to single Er³⁺ions. 

Solid-state spin defects are a promising platform for quantum science and technology. The realization of larger-scale quantum systems with solid-state defects will require high-fidelity control over multiple defects with nanoscale separations, with strong spin-spin interactions for multi-qubit logic operations and the creation of entangled states. We demonstrate an optical frequency-domain multiplexing technique, allowing high-fidelity initialization and single-shot spin measurement of six rare-earth (Er³⁺) ions, within the subwavelength volume of a single, silicon photonic crystal cavity. We also demonstrate subwavelength control over coherent spin rotations by using an optical AC Stark shift. Our approach may be scaled to large numbers of ions with arbitrarily small separation and is a step toward realizing strongly interacting atomic defect ensembles with applications to quantum information processing and fundamental studies of many-body dynamics.